On the Effect of Surface Texture and Nanoscale Surface Oxides on the Optical and Mechanical Properties Of Silicon Single Crystals and Mems Thin Films

On the Effect of Surface Texture and Nanoscale Surface Oxides on the Optical and Mechanical Properties Of Silicon Single Crystals and Mems Thin Films ABSTRACT This dissertation presents the combined results of analytical, computational and experimental study of the effects of surface texture and nanoscale surface oxides on the optical and mechanical properties of silicon […]

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Source: cs